10/6/2010	7:36:18 PM	Program exited cleanly
10/6/2010	7:54:28 PM	Program started normally
10/6/2010	7:54:28 PM	Helium valve closed
10/6/2010	7:54:28 PM	H2 valve closed
10/6/2010	7:54:28 PM	BCl3 valve closed
10/6/2010	7:54:28 PM	PH3 valve closed
10/6/2010	7:54:28 PM	SiCl4 pre valve closed
10/6/2010	7:54:28 PM	SiCl4 post valve closed
10/6/2010	7:54:28 PM	Main Vac valve closed
10/6/2010	7:54:28 PM	Bypass valve closed
10/6/2010	7:54:28 PM	Bubbler valve closed
10/6/2010	7:54:28 PM	Helium MFC set to  0.000000
10/6/2010	7:54:28 PM	H2 MFC set to  0.000000
10/6/2010	7:54:28 PM	BCl3 MFC set to  0.000000
10/6/2010	7:54:28 PM	PHl3 MFC set to  0.000000
10/6/2010	7:54:28 PM	SiCl4 MFC set to  0.000000
10/6/2010	7:54:28 PM	Bypass solenoid MFC set to  760.000000
10/6/2010	7:54:29 PM	Tube furnace set to 0
10/6/2010	7:54:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2010	7:54:42 PM	Recipe started at 7:54 PM
10/6/2010	7:54:42 PM	Helium valve closed
10/6/2010	7:54:42 PM	H2 valve closed
10/6/2010	7:54:42 PM	BCl3 valve closed
10/6/2010	7:54:42 PM	PH3 valve closed
10/6/2010	7:54:42 PM	SiCl4 pre valve closed
10/6/2010	7:54:42 PM	SiCl4 post valve closed
10/6/2010	7:54:42 PM	Main Vac valve closed
10/6/2010	7:54:42 PM	Bubbler valve closed
10/6/2010	7:54:42 PM	Bypass valve opened
10/6/2010	7:54:42 PM	Helium MFC set to  0.000000
10/6/2010	7:54:42 PM	H2 MFC set to  0.000000
10/6/2010	7:54:42 PM	BCl3 MFC set to  0.000000
10/6/2010	7:54:42 PM	PHl3 MFC set to  0.000000
10/6/2010	7:54:42 PM	SiCl4 MFC set to  0.000000
10/6/2010	7:54:42 PM	Bypass solenoid MFC set to  0.000000
10/6/2010	7:54:42 PM	Tube furnace set to 0
10/6/2010	7:54:42 PM	Helium valve closed
10/6/2010	7:54:42 PM	H2 valve closed
10/6/2010	7:54:42 PM	BCl3 valve closed
10/6/2010	7:54:42 PM	PH3 valve closed
10/6/2010	7:54:42 PM	SiCl4 pre valve closed
10/6/2010	7:54:42 PM	SiCl4 post valve closed
10/6/2010	7:54:42 PM	Bubbler valve closed
10/6/2010	7:54:42 PM	Main Vac valve opened
10/6/2010	7:54:42 PM	Bypass valve opened
10/6/2010	7:54:42 PM	Helium MFC set to  0.000000
10/6/2010	7:54:42 PM	H2 MFC set to  0.000000
10/6/2010	7:54:42 PM	BCl3 MFC set to  0.000000
10/6/2010	7:54:42 PM	PHl3 MFC set to  0.000000
10/6/2010	7:54:42 PM	SiCl4 MFC set to  0.000000
10/6/2010	7:54:42 PM	Bypass solenoid MFC set to  0.000000
10/6/2010	7:54:42 PM	Tube furnace set to 0
10/6/2010	7:54:43 PM	Run finished at 7:54 PM
10/6/2010	7:54:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
